au.\*:("ZHUK, D. W")
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The application of low-frequency glow discharge to high-rate deposition of a-Si :HBUDAGUAN, B. G; POPOV, A. A; SAZONOV, A. Yu et al.Journal of non-crystalline solids. 1998, Vol 227-30, pp 39-42, issn 0022-3093, aConference Paper
